When the action resumed, Svitolina, the world number five from Ukraine, regrouped and forced a decider after claiming the second set in 44 minutes during which both women struggled to hold serve.
"I was just trying to play my game and I was very happy to win".
"In Paris it was very hard to have that, but I think it's also the experience", Svitolina said. "She's strong there and she played her game".
After breezing through the first set, Wozniacki let a 3-1 lead in the second slip away as Stephens levelled at 3-3.
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Sixth seed Wozniacki, the champion in 2010, saw off unseeded American Stephens 6-2 6-3 in the first semi-final in Toronto. "Overall, I think the match was much longer than just the hours on the court". I have many tournaments ahead.
Wozniacki has ended a Toronto drought this week, winning her first matches at York University in 10 years.
"Every time this year when it has been raining I've had a great tournament, so I thought this must be luck".
Wozniacki will play defending champion Simona Halep or Elina Svitolina for the championship on Sunday at Toronto's Aviva Centre. "It's going to be a good match, I know this. I need some time to analyze this day (Saturday) and then move into final (Sunday), which is really soon". I will try to recover quickly because it was a very tough day not only physically but mentally.